Location
Shanghai New International Expo Centre (SNIEC)
No. 2345 Long Yang Road
Shanghai, China
http://semiconchina.semi.org/index.htm
Exhibition Hours, Dates & Days
09:00—17:00; March 18; Tuesday
09:00—17:00; March 19; Wednesday
09:00—16:00; March 20; Thursday
Visit us at Hall W5, Entegris Booth # 5423
Featured Products:
Contamination Control Solution for < 45 nm Chemical Processes
Clarilite Certified Reticle Haze Prevention (demonstration at the booth)
The Clarilite Certified reticle haze prevention system is the industry's first reticle haze prevention system that protects reticle purity from the reticle's arrival to the fab to production.
IntelliGen® Mini Two-Stage-Technology Dispense System (demonstration at the booth)
The IntelliGen® Mini photochemical dispense system utilizes proprietary two-stage technology and closed-loop pressure control to eliminate particulates and bubbles while providing accurate and repeatable dispense.
LiquidLens™ UPW Purification System
Designed specifically for 193 nm ArF immersion lithography systems
Torrento™ ATE 20nm Filter
Provides ultimate retention at exceptional flow rates - new standard for nondewetting Teflon® filters.
Front Opening Shipping Box (FOSB)
The SB300 is engineered to improve overall productivity for your facility by offering maximum wafer protection, optimum automation interface and increased overall yield.
Spectra™ Front Opening Unified Pod (FOUP)
The Spectra™ Front Opening Unified Pod (FOUP) offers unsurpassed performance for wafer protection.
300 mm Multiple Film Frame Shipper
The 300 mm Multiple Film Frame Shipper is an extension to Entegris' highly successful line of 200 mm shippers. It is engineered to provide a safe, clean and compact environment for storing and safely shipping 300 mm wafers mounted to film frames.
NT® 8800 Conductivity Sensor
This wafer shipper is engineered and manufactured to provide the cleanest wafer edge while delivering maximum protection for wafers during transport.
NT® 6500 Sentry™ Quick Connect (QC) II/III System
These are the quickest, safest, most user-friendly connection system available for high-purity bulk chemical dispense.
Planacore® PVA Brushes
Planacore® PVA Brushes with molded polypropylene (PP) disposable cores are designed to delivery superior performance and wafer-to-wafer conformity in post CMP wafer cleaning applications.
EGPS
The EGPS System uses ambient temperature purification technology, continuous XCDA® (extreme clean dry air), have low pressure drop and offer low cost of ownership.
Chambergard™ Diffusers
Chambergard diffusers are the choice to reliably increase system throughput by minmizing load lock vent cycle time.