ニュース

Location
Convention and Exhibition Center (COEX)
Seoul, Korea
www.semi.org

Exhibition Date & Hours
January 30, 10:00-18:00 (Wednesday)
January 31, 10:00-18:00 (Thursday)
February 1, 10:00-16:00 (Friday)

Please visit Entegris, Booth # 1610, Atlantic Hall to learn more.

Featured Products:

• Torrento™ ATE 20 nm Filter
  Provides ultimate retention at exceptional flow rates - new standard for nondewetting Teflon® filters.
• Clarilite Certified Reticle Haze Prevention
  The Clarilite Certified reticle haze prevention system is the industry's first reticle haze prevention system that protects reticle purity from the reticle's arrival to the fab to production.
• IntelliGen® Mini Two-Stage-Technology Dispense System (demonstration at the booth)
  The IntelliGen® Mini photochemical dispense system utilizes proprietary two-stage technology and closed-loop pressure control to eliminate particulates and bubbles while providing accurate and repeatable dispense.
• LiquidLens™ UPW Purification System
  Designed specifically for 193 nm ArF immersion lithography systems
• Front Opening Shipping Box (FOSB)
  The SB300 is engineered to improve overall productivity for your facility by offering maximum wafer protection, optimum automation interface and increased overall yield.
• Spectra™ Front Opening Unified Pod (FOUP)
  The Spectra™ Front Opening Unified Pod (FOUP) offers unsurpassed performance for wafer protection.
• 300 mm Multiple Film Frame Shipper
  The 300 mm Multiple Film Frame Shipper is an extension to Entegris' highly successful line of 200 mm shippers. It is engineered to provide a safe, clean and compact environment for storing and safely shipping 300 mm wafers mounted to film frames.
• Ultrapak® Edge Guard Wafer Shipper
  This wafer shipper is engineered and manufactured to provide the cleanest wafer edge while delivering maximum protection for wafers during transport.