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The new CR8 series includes valves and valve manifolds for ultrapure chemical applications. This product line offers two-way pneumatic and manual valves, and manifolds for low to medium flow applications, with flow factors (Cv) ranging from two to four. The valves offer reliable performance and easy serviceability – with a footprint that is smaller than most half-inch valves.
CR8 series valves are tested to four million cycles to ensure reliability and reduce cost of ownership. The two-way pneumatic valve is available in a high temperature version, which can operate up to 180°C (356°F). These capabilities allow the CR8 series to solve a variety of critical issues within the fab such as purity, corrosion and high temperature application needs.
Features and Benefits
Applications
The NT® 6520 Integrated Flow Controller (IFC) is one of the smallest liquid controllers available for accurate point-of-use blending and dispense applications. Our newest IFC uses differential pressure flow measurement technology and advanced closed-loop process control within a small footprint. This allows toolmakers to integrate more process functionality into their fabs. Visual indicators also provide diagnostics for preventative maintenance, troubleshooting and alarm conditions, enabling users to maintain high uptime.
Features and Benefits
Applications
