Aeronex® Purification Systems

Aeronex® EGPS purification systems provides continuous high-flow XCDA® (Extreme Clean Dry Air) point-of-use purge gas at a low cost of ownership through an industry-leading footprint reduction. Integrated as a component of Entegris’ Clarilite® reticle haze prevention solution, the system also ensures the purity of reticle and optical services in the photolithography fab.

Protego® Plus HTX Purifiers

Protego® Plus HTX metal ion purifiers provide the ultimate protection from ion contamination by providing high-capacity, single-pass removal of metal ions from DI water and some organic solvents. Designed for use at high temperatures (80°C), the clean polypropylene construction provides device stability in a compact cartridge design.