IntelliGen® Mini Dispense System

IntelliGen® Mini dispense system delivers ultimate defect reduction in point-of-use photochemical dispense applications with a patented advanced two-stage dispense technology to isolate filtration from dispense, minimizing the formation of microbridging defects and improving yield without sacrificing dispense repeatability. A 50 percent footprint reduction saves valuable space in track equipment and enables two-stage performance in the same space as a single stage pump.

LiquidLens™ UPW Systems

LiquidLens™ EX ultrapure water purification systems provide superior cleanliness, TOC reduction, thermal stability and process consistency to meet the critical requirements of immersion lithography applications. The new higher flow system enables high throughput of UPW and purification of multiple scanners from a single system.