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Patents

Entegris technologies and products are protected by patents in the United States and elsewhere around the world. This listing is provided
to satisfy the virtual patent marking provisions of various jurisdictions including 35 U.S.C. § 287(a) of the America Invents Act in the U.S.
Entegris products may not be all inclusive and other Entegris products not listed here may be protected by one or more patents. Certain of
these patents may be available for licensing.

This listing is updated as patent information changes. Check back often for the latest information.

BrightBlack®
Covered by or for use under U.S. Patents 5,518,528; 5,704,965; 5,704,967; 6,939,394; 6,743,278; 6,939,394; 7,494,530; 7,455,719; 8,002,880; 8,227,714 and 8,539,781. Additional patents may be pending in the U.S. and elsewhere.

BrightPak®
Covered by or for use under U.S. Patents: 9,067,718; 9,211,993 and D702,128. Additional patents may be pending in the U.S. and elsewhere.

Liquid Delivery
Covered by or for use under U.S. Patents: 5,964,254; 6,029,718; 6,047,744; 6,077,356; 6,192,919; 6,199,599; 6,296,025, 6,296,026; 6,435,229; 6,457,494; 6,637,475 and 6,880,592. Additional patents may be pending in the U.S. and elsewhere.

NOWPak®
Covered by or for use under U.S. Patents: 5,875,921; 6,206,240; 6,942,123; 6,698,619; 7,025,234; 7,067,616; 7,172,096; 7,188,644 and 7,335,721. Additional patents may be pending in the U.S. and elsewhere.

NOWTrak®
Covered by or for use under U.S. Patents 6,879,876; 7,152,781; 7,370,791; 7,664,568; 7,702,418; 7,747,344; 8,150,549; 8,849,448 and 9,031,683. Additional patents may be pending in the U.S. and elsewhere.

PDS®
Covered by or for use under U.S. Patents 5,518,528; 6,132,492; 6,406,519; 6,540,819 and 6,716,271. Additional patents may be pending in the U.S. and elsewhere.

Precursor Other
Covered by or for use under U.S. Patents 7,838,329; 8,008,117; 8,617,972 and 9,070,875. Additional patents may be pending in the U.S. and elsewhere.

Precursor Solution
Covered by or for use under U.S. Patents 7,705,382 and 8,501,976. Additional patents may be pending in the U.S. and elsewhere.

SAGE®
Covered by or for use under U.S. Patents 5,518,528; 6,132,492; 6,406,519 and 6,540,819. Additional patents may be pending in the U.S. and elsewhere.

SDS® 2
Covered by or for use under U.S. Patents 5,518,528; 5,704,965; 5,704,967; 5,935,305; 5,851,270; 6,204,180 and 5,917,140. Additional patents may be pending in the U.S. and elsewhere.

SDS® 3
Covered by or for use under U.S. Patents 5,518,528; 5,704,965; 5,704,967; 5,837,027; 5,851,270; 6,204,180; 6,743,278; 6,939,394; 7,494,530; 7,455,719; 7,501,010; 8,002,880; 8,506,689; 8,858,685 and 9,062,829. Additional patents may be pending in the U.S. and elsewhere.

VAC®
Covered by or for use under U.S. Patents 6,089,027; 6,101,816; 6,343,476; 6,857,447; 7,328,716; 7,614,421; 7,943,204; 8,389,068; 8,062,965; 8,138,071; 8,237,134; 8,389,068; 8,399,865; 8,598,022; 8,779,383; 8,785,889; 8,796,131 and 9,012,874. Additional patents may be pending in the U.S. and elsewhere.

Vaporizer
Covered by or for use under U.S. Patents 6,921,062; 7,487,956; 7,556,244; 7,828,274; 8,821,640 and 9,004,462. Additional patents may be pending in the U.S. and elsewhere.