Integra® Weir Valve From Entegris Delivers Up to 70% Increase in Flow Performance in Ultrapure, Bulk Chemicals and CMP Slurry Applications

Innovative design eliminates diaphragm separation in vacuum applications

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BILLERICA, Mass. – September 12, 2017 – Entegris Inc. (NASDAQ: ENTG), a leading specialty materials provider, released performance data today at SEMICON® Taiwan on its recently launched Integra® Plus WS (weir style) high-flow, fluid management valves. These valves, introduced in July of this year, are designed for use with corrosive chemicals in semiconductor manufacturing applications. The data, collected from extensive testing completed by Entegris in June, 2017 indicates up to a 70% increase in flow performance over competitive valves for applications involving ultrapure bulk chemicals and CMP slurry applications.  

“As semiconductor manufacturing has scaled, the requirements of chemical delivery systems have evolved to keep pace with concerns around chemical purity and high reliability, as well as meeting the higher flow requirements of larger facilities,” said Senior Vice President and General Manager of the Advanced Materials Handling Division for Entegris, Bill Shaner. “To that end, we have validated our new valve’s flow performance and we’re pleased with the results.” 

The new Integra Plus WS valves utilize a streamlined fluid flow path for improved flow performance. Flow-rate testing on the new valves has yielded superior results, when compared to alternative valve solutions (see Figure 1). 

The new valves offer an innovative, single-piece and adhesive-free diaphragm design that directly couple the diaphragm to the valve actuator to eliminate potential diaphragm separation in vacuum applications and increase valve life. They are constructed from high-purity, chemically resistant PFA and PTFE to maintain chemical purity and feature a small footprint to reduce required space within equipment. 

Integra Plus WS valves are available with PrimeLock®, Flaretek®  and PureBond® pipe port connections. Unique configurations with PrimeLock or Flaretek on one port and PureBond pipe on the other port provide system flexibility and easy installation into any fluid handling system.  For more information, please visit Entegris booth #176 during SEMICON® Taiwan, Sept 13-15, at the Taipei Nangang Exhibition Center, or visit