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Pegasus™ Coatings

Fluorine etch resistant coatings

Pegasus™ coatings are a family of precision-engineered PVD coatings tailored for fluorine plasma etch applications. They can be deposited on aluminum, alumina, stainless steel and other commonly used substrate materials, with superior adhesion at low temperatures. 

key features

  • Fluorine etch resistant
  • Low particle generation
  • Oxidation resistant
  • Dense and transparent