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SDS® Gas Delivery Systems

The safest gas storage and delivery package for highly toxic gases

Designed using specially formulated carbon-based adsorbents in the form of pucks inside the cylinder, SDS (Safe Delivery Source) systems both store and deliver gas subatmospherically. This technology virtually eliminates accidental gas releases.

Key features

With unsurpassed safety and elegant simplicity, SDS is the gold standard for eliminating ion implant operational risks

  • Adsorbent-based technology
  • Stores gas subatmospherically
  • Delivers gas subatmospherically
  • Eliminates the possibility of significant or catastrophic gas release
  • Reduced head space for maximum gas usage
  • Acknowledged by NFPA, DOT and the United Nations as safer than other gas packages