Please enter the email address for your account. A link to change your password will be emailed to you.All Fields Required
Increased process stability and longer lifetime using SUPERSiC® chamber components.
SUPERSiC® replacement discs for the G4 and G5 systems have proven to have advantages in three critical process parameters, including process stability, PL performance and lifetime. Components include 2” disc as well as inner and outer segments available for custom design.