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Cleanroom filtration utilizes unique chemistry to remove critical contaminants at a lower pressure drop. VaporSorb™ cleanroom chemical filters deliver greater than 95% removal efficiency. Implementation is easy in front/rear access frame banks, side access housing units or ceiling fan units.
We offer a wide range of graphite materials as well as post processing and machining capabilities to meet the demanding requirements of semiconductor processes. You can choose the right graphite for your application by grain size (one, five and ten micron) and all grades are sold in bulk form or as a custom machined components for specific applications.
Advanced, optically based monitoring and high performance concentration monitors enable greater process efficiency for BEOL, FEOL and sub-fab delivery chemical systems. Our portfolio of InVue® concentration monitors, dissolved oxygen sensors and refractometers provide customers with inline, real-time and scalable monitoring and detection systems.
The suite of Viaform Electro Plated Copper solutions have been the industry benchmark since the introduction of Copper Damascene processing. The solution family continues to advance to meet the challenges of void free filling of ever smaller features. New deposition materials such as Cobalt are also now offered. Entegris' ability to characterize the integration of the deposition and CMP process offers customers a unique insight in to material and process interactions.