Controlling metal ions and other contaminants in critical process streams is a vital way to improve operating efficiency and enable technology advances. Available with PTFE and PS, PES membrane and ion exchange media, each purifier is designed to reduce defects caused by metal ions and other contaminants.
Rugged and efficient, Entegris NOWPak® liner based systems maintain chemical purity, maximize utilization and ensure safe transport, containment and dispense of valuable, ultraclean process fluids. A reliable, comprehensive portfolio of bottles, canisters, closures and accessories is available that enhance tool productivity, increase yields and reduce operating costs.
IntelliGen® dispense system technology enables independent, optimum filtration and accurate dispense, providing the ultimate defect reduction in low-, mid- and high-viscosity point-of-use photochemical dispense. For additional Photochemical Dispense Pumps, please visit our Fluid Handling website.
We specialize in silicon and carbon-based coatings using PECVD processes. Highly compatible to fit your business, deposit coatings can be used on a variety of vacuum compatible substrates including metals, alloys, ceramics, semiconductors and polymers. We can coat chambers that can accommodate different shapes and sized items, up to 31" in diameter.