Solution for airborne molecular contamination (AMC) control.
Entegris provides a portofolio of airborne molecular contamination control to help you control contaminants in the entire lab and protecting both process equipment and wafer from the damaging effects of AMC.
Cleanroom filtration utilizes unique chemistry to remove critical contaminants at a lower pressure drop. VaporSorb™ cleanroom chemical filters deliver greater than 95% removal efficiency. Implementation is easy in front/rear access frame banks, side access housing units or ceiling fan units.