SUPERSiC® Silicon Carbide Components


Increased process stability and longer lifetime using SUPERSiC® chamber components

SUPERSiC® replacement discs for the G4 and G5 systems have proven to have advantages in three critical process parameters, including process stability, PL performance and lifetime. Components include 2” disc as well as inner and outer segments available for custom design.

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SUPERSiC® Silicon Carbide Materials