Wet Etch and Clean
Solutions that ensure contamination control, clean transport and advanced processing performance
Look to Entegris to reduce operating costs, maximize operational efficiency and improve the value of your chemical product. Entegris offers a variety of liquid filters and purifiers, fluid management, liquid packaging, specialty chemicals, heat exchangers, sensing and control and air filters.
Controlling metal ions and other contaminants in critical process streams is a vital way to improve operating efficiency and enable technology advances. Available with PTFE and PS, PES membrane and ion exchange media, each purifier is designed to reduce defects caused by metal ions and other contaminants.
Cleanroom filtration utilizes unique chemistry to remove critical contaminants at a lower pressure drop. VaporSorb™ cleanroom chemical filters deliver greater than 95% removal efficiency. Implementation is easy in front/rear access frame banks, side access housing units or ceiling fan units.