Specialty Audience

Specialty Materials


The drive toward making electronics faster, denser, and cheaper continues unabated. Shrinking device dimensions and structure changes place additional demands on the materials used in all steps of semiconductor processing. As device scaling continues, contamination and material purity become more important than ever and can be tackled by changing how deposition and etch tools are coated. Integrating new chemistries in deposition and etching steps can alleviate vertical scaling challenges as well.

With our advanced materials science expertise and our determination to help solve your most advanced technology challenges, we are prepared to help you maintain unprecedented levels of cleanliness. By providing precision-engineered specialty coatings and innovative precursor and plasma combinations for your applications, together we can enable high throughput and high yield to support the ever-increasing device storage needs.

96 Layers and Beyond

96 Layers and Beyond: 3D NAND Material and Integration challenges

Decades-old practices are no longer effective when increasing the number of 3D NAND structures to 96 layers and beyond.

Featured Insights

3D NAND Solutions
3D NAND Solutions

Three-dimensional vertically-stacked memory architectures offer exponential gains in flash memory storage, but they also introduce fundamental new challenges at the device fabrication and integration level. We understand many of these challenges and have ideal solutions for them.

96 Layers and Beyond
96 Layers and Beyond: 3D NAND Material and Integration challenges

Decades-old practices are no longer effective when increasing the number of 3D NAND structures to 96 layers and beyond.

Advanced Deposition Materials Innovation
Advanced Deposition Materials Innovation

With semiconductor nodes shrinking to 10 nm and below and once-flat architectures evolving into complex 3D structures, whole new paradigms in material deposition must be developed. Entegris takes a holistic approach to advanced material development, yielding industry-leading innovation.

The Silicon Precursor Toolbox for Low-temperature Deposition
The Silicon Precursor Toolbox for Low-temperature Deposition

A toolbox approach to choosing the most appropriate precursor and plasma combination for a given application makes process development more efficient, benefiting semiconductor device manufacturers and their customer.

Operational Excellence
Operational Excellence

Learn more about operational excellence at Entegris and our focus on material purity and preventing defects, our adherence to safety and environmental standards with technology such as SDS® cylinders, gas cabinets, and delivery systems, and our ability to supply locally.

Advanced Coatings
Advanced Coatings

Semiconductor processing at advanced nodes requires extreme levels of cleanliness to minimize the risk of yield loss associated with submicroscopic contaminants. At Entegris, we understand these challenges and offer precision-engineered coatings that extend tool life while improving device yield.

Interested in our specialty materials solutions?

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