Clean Chemical Delivery

As logic devices go to smaller line widths, 3D NAND architectures increase layers, and DRAM memory density increases, sensitivity to contamination and defects have a greater impact on device performance. To achieve optimum wafer yield and reliability, the microelectronics industry needs to address the increased materials consumption requirements and material purity challenges from chemical manufacture to point of use.

Entegris is in the unique position to help customers maintain a clean chemical delivery environment with contamination-controlled chemical packaging, filtration, pumps, and fluid handling products that will increase product yield and reduce financial loss.

Learn how clean chemical delivery can improve yield

We have a proven understanding of fluoropolymer processing and how to control potential sources of contamination.

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