Sensing and Control
Precise control and measurement of process fluids in harsh environments and ultrapure applications.
Providing a broad range of contamination control, integrated flow controllers, flowmeters, pressure transducers and other process solutions for precision control and measurement of process fluids.
Our electronic flowmeters provide simultaneous measurement of outlet pressure and flow rate, allowing for greater control of process variables. We offer an InVue® Model NT4400 that is ideal in high purity applications, and an NT™ Model 4401 that is ideal in high-temperature chemical applications.
Advanced, optically based monitoring and high performance concentration monitors enable greater process efficiency for BEOL, FEOL and sub-fab delivery chemical systems. Our portfolio of InVue® concentration monitors, dissolved oxygen sensors and refractometers provide customers with in-line, real-time and scalable monitoring and detection systems.
We have combined the latest electronic sensing technology with high-purity materials to create leading-edge pressure transducers to help you monitor or control process conditions. Measure vacuum and positive pressure conditions accurately and reliably with our single-port or flow-through models.