Advanced Coatings for Chamber Components

Protecting plasma chamber parts and components with advanced coatings

In this recorded webinar, Connor Gallegos, Product Manager, and Nilesh Gunda, Director, Coatings Product Technology, share the importance of advanced coatings for chamber parts and components, and highlight three successful coating methods.

  • PVD and ALD coatings overview
  • PVD and ALD coatings applications and components
  • ALD and PVD coatings case study


About Presenters:


Connor Gallegos | Product Manager

Connor came to Entegris with product engineering and product management experience and joined the Specialty Coatings team in 2018 as the product manager. Connor earned his BS in mechanical engineering from North Carolina State University and his Executive MBA from the Jack Welsh Management Institute.

Nilesh Gunda | Director, Coatings Product Technology

Nilesh Gunda is the director for coatings product technology at Entegris where he has been working on vacuum deposited coatings for the past 22 years. In his current role, Nilesh and his team identify and qualify new coating applications in semiconductor, aerospace, and industrial industries. Nilesh holds a Master of Science degree in materials science and engineering from Washington University in St. Louis.