E200 Maintenance Kits and Accessories
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- Higher performance SMIF pod door for use with both A200 and M200 wafer SMIF pod shell assemblies
- Enables you to upgrade A200 and M200 wafer SMIF pod technology
Specifications
The following replacement parts are available for E200 wafer SMIF pod doors:
Part Number | Description |
E200-0260S | Includes 10 replacement grommets for E200 wafer SMIF pod door |
E200-5500 | Includes 20 standard durometer PBT gaskets (E200-0250) |
E200-KIT-INLET | Replacement components for the inlet purge filter, includes 10 grommets, 10 check valves, and 10 purge filters |
E200-KIT-OUTLET | Replacement components for the outlet breather filter, includes 10 grommets, and 10 breather filters |
KIT-FILTER-BREATH | Replacement inlet breather filter |
KIT-FILTER-PURGE | Replacement outlet purge filter |
Successfully Opted for software Updates
Part Number | E200 Door Component | Filter Type | Gasket Type |
---|---|---|---|
E200-0260S | Grommet | N/A | N/A |
E200-5500 | Gasket | N/A | Standard durometer PBT |
KIT-FILTER-BREATH | Filter | Breather filter | N/A |
KIT-FILTER-PURGE | Filter | Purge filter | N/A |