M200 Maintenance Kits and Accessories
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Allows you to extend the life of your M200 wafer SMIF pod by replacing:
- Worn gaskets and wafer retainers
- Worn ergo Handles
- Worn cassette hold downs
Specifications
M200 wafer SMIF pod replacement parts
Part Number | Product Type | Description |
CM200-0911 | Universal cassette hold down kit | Includes 50 springs, cleaned |
M200-0961 | Small cassette hold down kit | Includes 50 springs, cleaned |
M200-5510 | Door kit | 1 standard door assembly with wide guide, M200-0253 door seal, cleaned |
M200-5510R | Door kit | 1 standard door assembly with wide guide, reduced door cover recess, M200-0253 door seal, cleaned |
M200-5516 | Door kit | 1 standard door assembly with wide guide, BEOL key hole, M200-0252 door seal, cleaned |
M200-5570 | Door kit | 1 door assembly with narrow guide, M200-0252 door seal, cleaned |
M200-5575 | Door kit | 1 door assembly with step guide, M200-0253 door seal, cleaned |
CM200-0252 | Door seal | 1 door seal, cleaned, with white TPE gasket (M200-0252) |
CM200-0253 | Door seal | 1 door seal with, cleaned, with white TPE gasket (M200-0253) |
CM200-05* | Ergo handle kits | Kit of 10 handles, cleaned |
CM200-0109 | Wafer retainer kit | Kit of 50 pairs, 6" PC G1 left and right wafer retainer blades, cleaned |
CM200-0112 | Wafer retainer kit | Kit of 100 blades, 8" PC G1 wafer retainer blades, cleaned |
CM200-092X | Wafer retainer retrofit kit | 1 set tan 8" PEEK G3 left and right wafer retainers, and left and right retainer cams, cleaned |
CM200-092XM | Wafer retainer retrofit kit | 1 set modified black 8" PEEK G3 left and right wafer retainers, and left and right retainer cams, cleaned |
M200-0808S | Autokinetic (AK) handle kit |
Kit of 100, SEMI E47 AK compliant handles and screws |
*Denotes the various handle color options 00, 03, 04, 06, 07, and 10.
Successfully Opted for software Updates
Part Number | Product Type | Gasket Type | Handle Color | Wafer Retainer Type | Cassette Clip | Cassette Interface | Fab Interface |
---|---|---|---|---|---|---|---|
CM200-0109 | Wafer Retainer Kit | N/A | N/A | 6" PC Blade (G1) | N/A | N/A | N/A |
CM200-0112 | Wafer Retainer Kit | N/A | N/A | 8" PC Blade (G1) | N/A | N/A | N/A |
CM200-0253 | Door Seal Kit | M200-0253 | N/A | N/A | N/A | N/A | N/A |
CM200-0500 | Ergo Handle Kit | N/A | Black | N/A | N/A | N/A | N/A |
CM200-0506 | Ergo Handle Kit | N/A | Yellow | N/A | N/A | N/A | N/A |
CM200-0507 | Ergo Handle Kit | N/A | Green | N/A | N/A | N/A | N/A |
CM200-0911 | Cassette Hold Down Kit | N/A | N/A | N/A | Universal | N/A | N/A |
CM200-092X | Wafer Retainer Retrofit Kit | N/A | N/A | 8" Tan PEEK™ Spring (G3) | N/A | N/A | N/A |
CM200-092XM | Wafer Retainer Retrofit Kit | N/A | N/A | 8" Black PEEK™ Spring (G3-M) | N/A | N/A | N/A |
M200-0808S | Autokinetic (AK) Handle Kit | N/A | Black | N/A | N/A | N/A | N/A |
M200-5510 | Door Kit | N/A | N/A | N/A | N/A | Wide guide | Standard |
M200-5510R | Door Kit | N/A | N/A | N/A | N/A | Wide guide | Reduced door cover recess |
M200-5516 | Door Kit | N/A | N/A | N/A | N/A | Wide guide | BEOL key hole |