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NT™ Proportional Control Valves, Model 6300, Cv 5.6 - 10
NT™ Proportional Control Valves, Model 6300, Cv 5.6 - 10
NT™ Proportional Control Valves, Model 6300, Cv 5.6 - 10
The NT™ Proportional Control Valve, Model 6300 Cv 5.6 - 10 is developed for use in ultra high-purity applications. Compatible with highly corrosive processes and designed for use in CMP slurry applications.
Flow Factor
  • > 2.8
 Industry
  • Semiconductor
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
MegaTorr<sup>®</sup> PS6 Oxygen Gas Purifiers
MegaTorr® PS6 Oxygen Gas Purifiers
MegaTorr® PS6 Oxygen Gas Purifiers
Our catalyst and adsorber, PS6, O2 bulk gas purifiers efficiently remove H2O, CO, CO2, H2, and THC at flow rates up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
  • Oxygen (O2)
POCO HTC™ Foam
POCO HTC™ Foam
POCO HTC™ Foam
Our porous graphite that has high thermal conductivity and very efficient thermal energy transfer characteristics.
Material
  • Porous Graphite
 Industry
  • General Industrial
FluoroPure® 6" Diameter PFA Custom Pressure Vacuum Vessel
FluoroPure® 6" Diameter PFA Custom Pressure Vacuum Vessel
FluoroPure® 6" Diameter PFA Custom Pressure Vacuum Vessel
The larger 6" pressure vacuum vessel gives you 2.5 times more volume per inch than the 4" vessels, enabling you to dispense more fluid in less space.
Size
  • 6"
Rectangular 150 mm Dual Capacity Process Tanks (6.1 Gallons)
Rectangular 150 mm Dual Capacity Process Tanks (6.1 Gallons)
Rectangular 150 mm Dual Capacity Process Tanks (6.1 Gallons)
Our dual capacity injection molded tank enables you to process twice as many 150 mm cassettes in half the time
Capacity
  • Dual
 Style
  • Rectanglular
 Wafer Size
  • 150 mm
 Industry
  • Semiconductor
Telescopes - Structures and Mirrors
Telescopes - Structures and Mirrors
Telescopes - Structures and Mirrors
Thermally insensitive full silicon carbide assemblies for space, airborne, or ground applications
Industry
  • Aerospace
 Process
  • Optical Systems
Baffle Carriers and Wafers
Baffle Carriers and Wafers
Baffle Carriers and Wafers
SUPERSiC® Silicon Carbide wafer and wafer carrier solutions that fit all horizontal furnace systems. See benefits.
Industry
  • Semiconductor
  • Solar/PV
 Process
  • Deposition
SDS®2 Safe Delivery Source®
SDS®2 Safe Delivery Source®
SDS®2 Safe Delivery Source®
Store and delivers gas subatmospherically
Cylinder Volume
  • 0.44L
  • 2.2L
  • 6.6L
 Gases
  • AsH3
  • Enriched 11 BF3
  • Enriched 72 GeF4
  • Enriched 72 Plus GeF4
  • Natural GeF4
  • PH3
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
 Industry
  • Semiconductor
Beakers and Funnels
Beakers and Funnels
Beakers and Funnels
Ultrapure beakers and funnels available to meet your labware specifications
Materials
  • Natural PFA
 Product Type
  • Beaker or funnel
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Chacollet™ In-line Hydrocarbon Purifiers
Chacollet™ In-line Hydrocarbon Purifiers
Chacollet™ In-line Hydrocarbon Purifiers
Find Chacollet™ In-line Hydrocarbon Purifiers at Entegris. Industry-leading gas purifier and gas purification systems since 1966. Entegris. Creating a material advantage.
Gases Purified
  • Argon (Ar)
  • Nitrogen (N2)
  • Helium (He)
  • Extreme clean dry air (XCDA®)
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