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GateKeeper<sup>®</sup> Z2 Series Gas Purification Systems
GateKeeper® Z2 Series Gas Purification Systems
GateKeeper® Z2 Series Gas Purification Systems
GateKeeper® Z2 series gas purification system (GPS) for continuous high flow, point-of-use purified XCDA® (extreme clean dry air) purge gas at a low cost of ownership
Gases Purified
  • Extreme clean dry air (XCDA®)
GateKeeper<sup>®</sup> Z3 Series Gas Purification Systems
GateKeeper® Z3 Series Gas Purification Systems
GateKeeper® Z3 Series Gas Purification Systems
GateKeeper® Gas Purification System (GPS) Z3 Series for continuous high flow, point of use purified XCDA® (Extreme Clean Dry Air) purge gas at a low cost of ownership
Gases Purified
  • Extreme clean dry air (XCDA®)
Aeronex® Z2 Series Gas Purification Systems
Aeronex® Z2 Series Gas Purification Systems
Aeronex® Z2 Series Gas Purification Systems
The Aeronex Gas Purification system (AGPS) Z2 series, is the latest continuous sevice bulk gas purification system from Entegris.
Gases Purified
  • Extreme clean dry air (XCDA®)
Pharmsteri™ II PES 0.22 Buffer Capsule Filter
Pharmsteri™ II PES 0.22 Buffer Capsule Filter
Pharmsteri™ II PES 0.22 Buffer Capsule Filter
PES 0.22 µm capsule filter that delivers superior flow rates in a broad range of chemical conditions to deliver significant economic advantages
Brand Name
  • Pharmsteri™
 Chemistry
  • Acids
  • Buffers
  • Bases
 Industry
  • Life Sciences
  • Pharmaceutical
 Process
  • Steam-in-Place (SIP)
POCO HTC™ Foam
POCO HTC™ Foam
POCO HTC™ Foam
Our porous graphite that has high thermal conductivity and very efficient thermal energy transfer characteristics.
Material
  • Porous Graphite
 Industry
  • General Industrial
NT™ Proportional Control Valves, Model 6300, Cv up to 2.8
NT™ Proportional Control Valves, Model 6300, Cv up to 2.8
NT™ Proportional Control Valves, Model 6300, Cv up to 2.8
The NT™ Proportional Control Valve, Model 6300 Cv ≤ 2.8 is developed for use in ultra high-purity applications. Compatible with highly corrosive processes and designed for use in CMP slurry applications.
Flow Factor
  • ≤ 2.8
 Industry
  • Semiconductor
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
125 mm Solar Cell Carriers
125 mm Solar Cell Carriers
125 mm Solar Cell Carriers
Secure protection for 125 mm solar cells or other square devices
Capacity
  • 25
 Substrate Size
  • 125 mm
2.5" and Smaller Wafer Carriers
2.5" and Smaller Wafer Carriers
2.5" and Smaller Wafer Carriers
Safely secure 2.5”, 2.25”, and 2” wafers in our convenient, easy to use wafer carriers
Product Type
  • Process wafer carrier
100 mm Solar Cell Carriers
100 mm Solar Cell Carriers
100 mm Solar Cell Carriers
Secure protection for 100 mm solar cells or other square devices
Capacity
  • 25
 Substrate Size
  • 100 mm
UltraPur™ 4MS
UltraPur™ 4MS
UltraPur™ 4MS
UltraPur™ 4MS is a precursor used in the chemical vapor deposition of low-k inter-metal dielectric films for sub-0.25µm IC interconnects.
CAS #
  • 75-76-3
 Chemical Formula
  • Si(CH3)4
 Element
  • Tetramethylsilane
 Industry
  • Semiconductor
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