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H20 Series Clips and Boxes
H20 Series Clips and Boxes
H20 Series Clips and Boxes
Various clips and boxes for use with our H20 Series 2" square bare die trays
Product Type
  • Clips/boxes
E200 Maintenance Kits and Accessories
E200 Maintenance Kits and Accessories
E200 Maintenance Kits and Accessories
Replacement filters, gaskets and grommets for E200 wafer SMIF pod doors
Product Type
  • Maintenance kit or accessory
H20 Series Inserts
H20 Series Inserts
H20 Series Inserts
Protect your sensitive components during shipment with our H20 bare die tray inserts
Product Type
  • Tray inserts
IntelliGen® HV20 Dispense System
IntelliGen® HV20 Dispense System
IntelliGen® HV20 Dispense System
Advanced two-stage system that enables enables independent dispense and filtration of up to 20 mL of high-viscosity fluids
Product Type
  • Photochemical dispense system
 Dispense Performance Volume
  • 0.1 - 20.0 mL in 0.001 mL increments
 Viscosity
  • 1,000 - 20,000 cP
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • AlCl3
 Dimensions
  • 331.31 mm (13.04") H
  • 243.84 mm (9.6") W
 OEM Tool
  • Tokyo Electron TELINDY™
  • Lam® Research
 Industry
  • Semiconductor
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • HfCl4
  • ZrCl4
 Dimensions
  • 257 mm (10.12") H
  • 139.7 mm (5.5") W
 OEM Tool
  • ASM Pulsar®
 Industry
  • Semiconductor
E2600 Filter Housing
E2600 Filter Housing
E2600 Filter Housing
Advanced protection for optics and resists. Chemically purify environmental air used in photolithography exposure tools.
Contaminants
  • Acids
  • Bases
 Industry
  • Semiconductor
  • Data Storage
 Process
  • Photolithography
E-Beam Crucibles
E-Beam Crucibles
E-Beam Crucibles
E-beam crucibles provide improved evaporation performance. See specifications.
Industry
  • Semiconductor
  • Industrial
 Process
  • Deposition
H20 Series Miscellaneous and Secondary Packaging
H20 Series Miscellaneous and Secondary Packaging
H20 Series Miscellaneous and Secondary Packaging
Offering secondary packaging boxes, bags, and labels for use with our H20 Series 2" square bare die trays.
Product Type
  • Secondary packaging
H20 Series Covers
H20 Series Covers
H20 Series Covers
Offering a wide selection of covers and material options to protect bare die during handling
Product Type
  • Cover
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