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UltraPur™ 4MS is a precursor used in the chemical vapor deposition of low-k inter-metal dielectric films for sub-0.25µm IC interconnects.
CAS #
- 75-76-3
- Si(CH3)4
- Tetramethylsilane
- Semiconductor
Our palladium, PS7-PD, series H2 gas purifiers efficiently remove H2O, O2, CO, CO2, H2, THC, N2, He, and Ar at flow rates of up to 2,170 slpm (130 Nm3/hr).
Gases Purified
- Hydrogen (H2)
UltraPur™ HfCl4 is a precursor used in the ALD process
CAS #
- 13499-05-3
- HfCl4
- Hafnium tetrachloride
- Semiconductor
Our auto regenerable, PS7-A, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, and NMHC at flow rates up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
- Hydrogen (H2)
Our adsorber and getter, PS7-H, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, THC, and N2 at flow rates up to 3,333 slpm (200 Nm3/hr).
Gases Purified
- Hydrogen (H2)
Our cryogenic, PS7-CR, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, THC, and N2 at flow rates of up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
- Hydrogen (H2)
This 3/4” pneumatic normally open valve provides reliable service in CMP and ultra high purity chemical applications where space is limited and high flow is required
Actuator Type
- Pneumatic normally open
- Pneumatic
- 2-way
- 3/4"
- PrimeLock®
- Flaretek®
- PureBond® pipe
- Super 300 Type Pillar®
This 3/4” pneumatic normally closed valve provides reliable service in CMP and ultra high purity chemical applications where space is limited and high flow is required
Actuator Type
- Pneumatic normally closed
- Pneumatic
- 2-way
- 3/4"
- PrimeLock®
- Flaretek®
- PureBond® pipe
- Super 300 Type Pillar®
Our porous graphite that has high thermal conductivity and very efficient thermal energy transfer characteristics.
Material
- Porous Graphite
- General Industrial
Our CR4 Series 3-way valves have a three-ported design that enables system design simplification while minimizing footprint. The pneumatic, Luer valve has a compact, modular design that enables manifold customization.
Actuator Type
- Pneumatic
- Luer
- 3-way
- ≥ 149°C (300°F)
- ≥ 100°C (212°F)
- Flaretek®
- FNPT
- Super 300 Type Pillar®
- PureBond® pipe