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PDS®-V Pure Delivery Source Subatmospheric delivery
PDS®-V Pure Delivery Source Subatmospheric delivery
PDS®-V Pure Delivery Source Subatmospheric delivery
Subatmospheric delivery
Cylinder Volume
  • 50L
 Gases
  • Natural BF3
  • Enriched 11 BF3
 System Type
  • Subatmospheric delivery (SAGS type II)
 Industry
  • Semiconductor
  • Flat Planel Display
NT™ Proportional Control Valves, Model 6300, Cv up to 2.8
NT™ Proportional Control Valves, Model 6300, Cv up to 2.8
NT™ Proportional Control Valves, Model 6300, Cv up to 2.8
The NT™ Proportional Control Valve, Model 6300 Cv ≤ 2.8 is developed for use in ultra high-purity applications. Compatible with highly corrosive processes and designed for use in CMP slurry applications.
Flow Factor
  • ≤ 2.8
 Industry
  • Semiconductor
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
Impact® 2 Filter Manifold (8G, 2-V2)
Impact® 2 Filter Manifold (8G, 2-V2)
Impact® 2 Filter Manifold (8G, 2-V2)
Transitional photochemical dispense system flow-through-device for use with Impact® point-of-use filters.
Brand Name
  • Impact®
 Chemistry
  • Photoresist
  • Photochemical
  • Solvent
 Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
 Installation Point
  • Point of Tool
Impact® 2 V2 Filter
Impact® 2 V2 Filter
Impact® 2 V2 Filter
Clean, point-of-use photochemical filter with robust flow rate performance and reduced microbubble formation capabilities.
Brand Name
  • Impact®
 Chemistry
  • Photoresist
  • Photochemical
  • Solvent
 Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
 Installation Point
  • Point of Tool
CR8 Series Manual Valves, 1/2" Orifice, 2-way, Toggle
CR8 Series Manual Valves, 1/2" Orifice, 2-way, Toggle
CR8 Series Manual Valves, 1/2" Orifice, 2-way, Toggle
CR8 Series valves are ideal for low- to medium-flow applications, with flow factors from 1.8 – 3.4 Cv. The manual, toggle valve has a compact, modular design, increased temperature capabilities and maximized flow.
Actuator Type
  • Manual toggle
 Configuration
  • 2-way
 Port Connection
  • Flaretek®
  • Super 300 Type Pillar®
  • PrimeLock®
  • PureBond® pipe
  • Tube stub
 Port Size
  • 1/4"
  • 1/2"
  • 3/4"
CR8 Series Manual Valves, 1/2" Orifice, 2-way, Multi-turn
CR8 Series Manual Valves, 1/2" Orifice, 2-way, Multi-turn
CR8 Series Manual Valves, 1/2" Orifice, 2-way, Multi-turn
CR8 Series valves are ideal for low- to medium-flow applications, with flow factors from 1.8 – 3.4 Cv. The manual, multi-turn valve has a compact, modular design, increased temperature capabilities and maximized flow.
Actuator Type
  • Manual multi-turn
 Configuration
  • 2-way
 Port Connection
  • Flaretek®
  • Super 300 Type Pillar®
  • PrimeLock®
  • PureBond® pipe
  • Tube stub
 Port Size
  • 1/4"
  • 1/2"
  • 3/4"
Pharmsteri™ II PES 0.22 Buffer Capsule Filter
Pharmsteri™ II PES 0.22 Buffer Capsule Filter
Pharmsteri™ II PES 0.22 Buffer Capsule Filter
PES 0.22 µm capsule filter that delivers superior flow rates in a broad range of chemical conditions to deliver significant economic advantages
Brand Name
  • Pharmsteri™
 Chemistry
  • Acids
  • Buffers
  • Bases
 Industry
  • Life Sciences
  • Pharmaceutical
 Process
  • Steam-in-Place (SIP)
CR8 Series Pneumatic Valves, 1/2" Orifice, 2-way, Normally Open Tube