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MegaTorr<sup>®</sup> PS7-PD Hydrogen Gas Purifiers
MegaTorr® PS7-PD Hydrogen Gas Purifiers
MegaTorr® PS7-PD Hydrogen Gas Purifiers
Our palladium, PS7-PD, series H2 gas purifiers efficiently remove H2O, O2, CO, CO2, H2, THC, N2, He, and Ar at flow rates of up to 2,170 slpm (130 Nm3/hr).
Gases Purified
  • Hydrogen (H2)
MegaTorr<sup>®</sup> PS7-A Hydrogen Gas Purifiers
MegaTorr® PS7-A Hydrogen Gas Purifiers
MegaTorr® PS7-A Hydrogen Gas Purifiers
Our auto regenerable, PS7-A, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, and NMHC at flow rates up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
  • Hydrogen (H2)
MegaTorr<sup>®</sup> PS7-CR Hydrogen Gas Purifiers
MegaTorr® PS7-CR Hydrogen Gas Purifiers
MegaTorr® PS7-CR Hydrogen Gas Purifiers
Our cryogenic, PS7-CR, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, THC, and N2 at flow rates of up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
  • Hydrogen (H2)
MegaTorr<sup>®</sup> PS7-H Hydrogen Gas Purifiers
MegaTorr® PS7-H Hydrogen Gas Purifiers
MegaTorr® PS7-H Hydrogen Gas Purifiers
Our adsorber and getter, PS7-H, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, THC, and N2 at flow rates up to 3,333 slpm (200 Nm3/hr).
Gases Purified
  • Hydrogen (H2)
POCO HTC™ Foam
POCO HTC™ Foam
POCO HTC™ Foam
Our porous graphite that has high thermal conductivity and very efficient thermal energy transfer characteristics.
Material
  • Porous Graphite
 Industry
  • General Industrial
TMB
TMB
TMB
Ultrapur™ TMB is a precursor used in deposition of doped silicate glass in low pressure, plasma-enhanced CVD process.
CAS #
  • 121-43-7
 Chemical Formula
  • C3H9BO3
 Element
  • Trimethylborate
 Industry
  • Semiconductor
Savana® PTFE Filter
Savana® PTFE Filter
Savana® PTFE Filter
Designed for point-of-tool and dispense solvent, DI water, and dilute acid and base appilcations
Brand Name
  • Savana®
 Chemistry
  • Solvent
  • Aqueous Acids
  • Bases
  • Detergents
  • DI Water
 Feature Size (Layer)
  • N/A
 Installation Point
  • Point of Tool
  • Bulk
ProcessGard® PTFE Plus Filters
ProcessGard® PTFE Plus Filters
ProcessGard® PTFE Plus Filters
Unmatched durability and cleanliness in point-of-tool and dispense applications involving solvents, DI water, and dilute acids and bases
Brand Name
  • ProcessGard®
 Chemistry
  • DI Water
  • Dilute Bases
  • Dilute Acids
  • Solvent
 Installation Point
  • Point of Tool
  • Bulk
 Industry
  • Data Storage
  • Semiconductor
  • Flat Panel Display
SC Housing Kit
SC Housing Kit
SC Housing Kit
Bulk, multi-round, stainless steel filter housing with 4, 7, 11 or 13 filter capacity
Brand Name
  • SC
 Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Solvents
 Feature Size (Layer)
  • N/A
 Installation Point
  • Bulk
Baffle Carriers and Wafers
Baffle Carriers and Wafers
Baffle Carriers and Wafers
SUPERSiC® Silicon Carbide wafer and wafer carrier solutions that fit all horizontal furnace systems. See benefits.
Industry
  • Semiconductor
  • Solar/PV
 Process
  • Deposition
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