Liquid Filters
- Fluorogard®
- Aggressive Acids
- Aggressive Bases
- Solvent
- 28-90 nm
- >90 nm
- Point of Tool
- Bulk
- Fluorogard®
- Photoresist
- Photochemical
- Solvent
- Non-Oxidizing Chemicals
- 28-90 nm
- >90 nm
- Point of Tool
- Bulk
- Fluorogard®
- Solvent
- Aqueous Acids
- Bases
- Detergents
- >90 nm
- Point of Tool
- Bulk
- Planargard®
- Slurry
- <10 nm
- 14-22 nm
- 28-90 nm
- >90 nm
- Bulk
- ProcessGard®
- Slurry
- N/A
- Point of Tool
- Point of Dispense
- Savana®
- Dilute Acids
- Dilute Bases
- Solvent
- Photochemical
- N/A
- Point of Tool
- ProcessGard®
- Dilute Acids
- Dilute Bases
- Resist Stripper
- Solvent
- N/A
- Point of Tool
- Point of Dispense
- Savana®
- Dilute Acids
- Dilute Bases
- DI Water
- N/A
- Point of Tool
- Bulk