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50 Years Strong!

Feb. 3, 2017

Corporate Fact Sheet
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  • Contaminants
  • Gases
  • Maximum Flow Rate
GateKeeper® Gas Purification System (GPS) Z3 Series for continuous high flow, point of use purified XCDA® (Extreme Clean Dry Air) purge gas at a low cost of ownership
Contaminants
  • Volatile acids
  • Volatile bases
  • Refractory compounds
  • Condensable organics
  • Moisture
Gases
  • CDA
Max Operating Pressure
  • 5-51-17.23 bar (80-250 psig)
Maximum Flow Rate
  • 6211 slpm
  • 7764 slpm
  • 9317 slpm
GateKeeper® Gas Purification System (GPS) EX Series for continuous high flow, point of use purified H2 (Hydrogen Gas) purge gas at a low cost of ownership
GateKeeper® HX Series - Gases Purified: Hydrogen (H2), Nitrogen (N2) or Argon (Ar). Continuous flow, point-of-use purified hydrogen, nitrogen or argon gas at a low cost of ownership.
Contaminants
  • H20
  • CO
  • CO2
  • O2
  • Non-methane hydrocarbons
Gases
  • H2
  • N2
  • Ar
Max Operating Pressure
  • 5-51-17.23 bar (80-250 psig)
Maximum Flow Rate
  • 311 slpm
  • 466 slpm
  • 776 slpm
  • 932 slpm
  • 6211 slpm
  • 7764 slpm
  • 9317 slpm
The GateKeeper Gas Purification System (GPS) DX series is a state-of the-art continuous service gas purification system from Entegris that brings advanced technology to gas purification. It provides semiconductor manufacturers with an innovative solution for higher wafer yields and lower cost of ownership.
Contaminants
  • Volatile acids
  • Volatile bases
  • Refractory compounds
  • Condensable organics
  • Non-condensable organics
  • Moisture
Gases
  • CO2
Max Operating Pressure
  • 5-51-17.23 bar (80-250 psig)
Maximum Flow Rate
  • 311 slpm
  • 466 slpm
  • 776 slpm
  • 932 slpm
Continuous high-flow, point-of-use, purified CO2 gas at a low cost of ownership
GateKeeper® Gas Purification System (GPS) SX Series for continuous flow, point-of-use purified NH3 gas at a low cost of ownership
GateKeeper® Z2 Series
Contaminants
  • Volatile acids
  • Volatile bases
  • Refractory compounds
  • Condensable organics
  • Moisture
Gases
  • CDA
Max Operating Pressure
  • 5-51-17.23 bar (80-250 psig)
Maximum Flow Rate
  • 311 slpm
  • 466 slpm
  • 776 slpm
  • 932 slpm
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