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  • Brand Name
  • Chemistry
  • Feature Size (Layer)
  • Installation Point
Point-of-tool, DI water filter with strong particle removal and flow rate performance
Brand Name
  • Fluorogard®
Chemistry
  • Solvent
  • Aqueous Acids
  • Bases
  • Detergents
  • DI Water
Feature Size (Layer)
  • >90 nm
Installation Point
  • Point of Tool
  • Bulk
Best in class, low-temperature dilute acid filter
Brand Name
  • Intercept®
Chemistry
  • Dilute Acids
Feature Size (Layer)
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Best-in-class, bulk CMP slurry filter for sub 45 nm technology nodes to prevent micro-scratches
Brand Name
  • Planargard®
Chemistry
  • Slurry
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Bulk
Best-in-class, ultra-clean, bulk photochemical filter.
Brand Name
  • Microgard™
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-28 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Bulk
Point-of-tool filter in post-CMP rinse processes
Brand Name
  • ProcessGard®
Chemistry
  • Dilute Acids
  • Dilute Bases
  • Solvent
  • Resist Stripper
Feature Size (Layer)
  • >90 nm
Installation Point
  • Prefiltration
  • Point of Tool
Small disc filter for general purpose chemical R&D applications
Brand Name
  • Savana®
Chemistry
  • Photochemical
  • Solvent
  • Photoresist
Feature Size (Layer)
  • N/A
Installation Point
  • Lab Bench
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