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  • Cut Rate
Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage
Conditioner Aggressiveness
  • Mild
  • Moderate
  • Aggressive
Cut Rate
  • 5 um/hr
  • 12 um/hr
  • 20 um/hr
  • 40 um/hr
  • 60 um/hr
  • ~75 um/hr
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