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50 Years Strong!

Feb. 4, 2017

Corporate Fact Sheet
Narrow Your Selection
  • Corrosion Resistance
  • Hardness
  • Structure
Pegasus™ 100 series coatings are a family of precision-engineered PVD coatings tailored for fluorine plasma etch applications. See specifications.
Coating Thickness
  • Up to 10 µm
Corrosion Resistance
  • Fluorine Environments
Elastic Modulous
  • 160 GPa
Hardness
  • 1400 HV
Pegasus™ 500 Series Coatings are highly fluorine, etch-resistant and transparent coatings ideal for semiconductor environments. See specifications.
Coating Thickness
  • Up to 10 µm
Corrosion Resistance
  • Fluorine and Chlorine Environments
Elastic Modulous
  • 190 GPa
Hardness
  • 1100 HV
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