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Jun. 1, 2014

PECVD and PVD Coatings
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  • Structure
Pegasus™ 500 Series Coatings are highly fluorine, etch-resistant and transparent coatings ideal for semiconductor environments. See specifications.
Coating Thickness
  • Up to 10 µm
Corrosion Resistance
  • Fluorine and Chlorine Environments
Elastic Modulous
  • 190 GPa
Hardness
  • 1100 HV
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