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  • Coating Thickness
  • Corrosion Resistance
  • Hardness
  • Structure
  • Temperature - Use
Find SilicoMax™ ultrapure silicon carbide coating at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • A few nm to over 60 µm
Corrosion Resistance
  • Aqueous including acids and alkalis
Electrical Resistivity
  • ~108 Ω-cm
Hardness
  • 1600 HV
Find UltraC™ Diamond, an ultra-hard diamond-like carbon (DLC) coating at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • 1 - 10 µm
Corrosion Resistance
  • Most acids and alkalis
Electrical Resistivity
  • 105 - 107 Ω-cm
Hardness
  • 2450 - 2855 HV (24-28 GPa)
Find Ultrapure Silicon, a 99.9995% pure silicon coating for contamination control, at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • A few nm to over 150 µm
Corrosion Resistance
  • Aqueous including acids and alkalis
Electrical Resistivity
  • 108 - 109 Ω-cm
Hardness
  • 2453 - 2855 HV (24-28 GPa)
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