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Advanced scanner optics and resist protection. The SilverSet® Chemical Air Filter System offers advanced scanner lens protection for 248 nm and 193 nm dry and immersion scanners.
Contaminants
  • Acids
  • Bases Organics
VaporSorb™ CSP-32 Chemical Air Filters offer advanced protection for exposure tool optics and photoresists.
Contaminants
  • Acids
  • Bases Organics
Greater protection from LMWSi organic compounds. Our Scanner Pre-Filter System protects scanner optics and extends integrated OEM scanner filter organic life.
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