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SEMICON® China Mar. 14, 2018 - Mar. 16, 2018 Pudong, Shanghai, China  Shanghai New International Expo Centre
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  • Brand Name
  • Chemistry
  • Feature Size (Layer)
  • Installation Point
Advanced clean, point-of-use filter designed for NTD and RRC solvents.
Brand Name
  • Eximor™
Chemistry
  • Solvent
Feature Size (Layer)
  • 14-22 nm
Installation Point
  • Point of Tool
Transitional photochemical dispense system flow-through-device
Brand Name
  • Eximor™
Chemistry
  • Solvent
Feature Size (Layer)
  • N/A
Installation Point
  • Point of Tool
Advanced clean, point-of-use filter designed for NTD and RRC solvents.
Brand Name
  • Eximor™
Chemistry
  • Solvent
Feature Size (Layer)
  • 14-22 nm
Installation Point
  • Point of Tool
Transitional photochemical dispense system flow-through-device for use with Impact® point-of-use filters
Brand Name
  • Impact®
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
Installation Point
  • Point of Tool
Best-in-class, ultra-clean, point-of-use photochemical filter, delivering superior flow rate performance and reduced microbubble formation capabilities.
Brand Name
  • Impact®
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
Installation Point
  • Point of Tool
Clean, point-of-use photochemical filter with robust flow rate performance and reduced microbubble formation capabilities.
Brand Name
  • Impact®
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Transitional photochemical dispense system flow-through-device for use with Impact® point-of-use filters.
Brand Name
  • Impact®
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Point of dispense, low hold up volume photochemical filter
Brand Name
  • Impact®
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Point of use DI water and photochemical solvent filter
Brand Name
  • Optimizer®
Chemistry
  • DI Water
  • Solvent
  • Photochemical
Feature Size (Layer)
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Transitional photochemical dispense system flow-through-device for use with Optimizer® point-of-use filters.
Brand Name
  • Optimizer®
Chemistry
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
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