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SEMICON® China Mar. 14, 2018 - Mar. 16, 2018 Pudong, Shanghai, China  Shanghai New International Expo Centre
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  • Brand Name
  • Chemistry
High-efficiency solvent purifier/filter providing metals and particle removal at the device level in critical clean IPA applications
Brand Name
  • Protego®
Chemistry
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at high temperatures (up to 80C)
Brand Name
  • Protego®
Chemistry
  • DI Water
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Ultraclean solvent purification with total metal removal performance
Brand Name
  • Purasol™
Chemistry
  • Solvents
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Bulk
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