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SEMICON Korea 2018 KO Semiconductor Jan. 31, 2018 - Feb. 2, 2018 Seoul, Korea,   COEX
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  • Contaminants
  • Gases
  • Media
  • Max Operating Pressure
  • Maximum Flow Rate
GateKeeper® GPU Gas Purifiers were designed to improve purity consistency, lifetime and final purity.
Contaminants
  • H2O
  • CO2
  • O2
  • CO
  • H2
  • CxHy (45-100 amu)
  • CxHy (>100 amu)
  • Refractory compounds
  • Condensable organics
  • Non-condensable organics
  • Volatile acids
  • Volatile bases
Media
  • EX
  • HX
  • IX
  • TX
  • WX
  • OP
Max Operating Pressure
  • 13790 kPa (2000 psig)
  • 4826 kPa (700 psig)
  • 3482 kPa (505 psig)
  • 13790 kPa (2000 psig)
  • 6895 kPa (1000 psig)
  • 3034 kPa (440 psig)
Maximum Flow Rate
  • 1000-1500 slpm
  • 2000-2500 slpm
  • 0.5-1 slpm
  • 5-10 slpm
  • 20-50 slpm
  • 75-120 slpm
  • 300-500 slpm
  • 800 slpm
GateKeeper® HX Series for continuous flow, point-of-use purified hydrogen, nitrogen or argon gas at low cost.
Contaminants
  • H2O
  • O2
  • CO
  • CO2
  • H2 (H2 is removed from N2 and noble gases only)
Max Operating Pressure
  • 3135 kPa (440 psig)
  • 3583 kPa (505 psig)
  • 4928 (700 psig)
  • 6996 kPa (1000 psig)
  • 20096 kPa (2900 psig)
Maximum Flow Rate
  • 3-20 slpm
  • 50-120 slpm
  • 300-1500 slpm
  • 2000-2500 slpm
Available for low- and high-flow point-of-use applications, GateKeeper® inert gas purifiers are designed for use with N2, He, Ne, Kr, Xe, Ar, halocar-bons and light hydrocarbons. The purifiers remove O2, H2, CO, CO2 and H2O to sub-ppb (parts-per-billion) levels; SO2 to sub-ppt (parts-per-trillion) levels.
Contaminants
  • O2
  • H2
  • CO
  • CO2
  • H2O
  • SO2
Media
  • Nickel metallic / Metal oxide
Max Operating Pressure
  • 1724 kPa (250 psig)
  • 1379 kPa (200 psig)
  • 3583 kPa (505 psig)
  • 4826 (700 psig)
  • 6895 kPa (1000 psig)
  • 19995 kPa (2900 psig)
Maximum Flow Rate
  • 1-3 slpm
  • 20-60 slpm
  • 120-500 slpm
  • 1000-20
  • 000 slpm
Entegris’ GateKeeper® 200M Bulk Gas Purifiers are ideal for facility purification and as backup to the AGPS auto-regen system or other bulk purification systems.
Contaminants
  • H2O
  • CO2
  • CO
  • O2
  • H2
  • H2S
  • NOx
  • NH3
  • NMHC
  • SO2
Media
  • Nickel metallic
  • Inorganic
Max Operating Pressure
  • 1379 kPa (200 psig)
Maximum Flow Rate
  • 20
  • 000 slpm
Available for low and high-flow applications, GateKeeper® optics gas purifiers are designed for use with CDA (air) and remove H2O, volatile bases, volatile acids, condensable organics and refractory compounds to ppt (parts-per- trillion) levels.
Contaminants
  • H2O
  • Volatile bases
  • Volatile acids
  • Condensable organics
  • Refractory compounds
Media
  • Inorganic
Max Operating Pressure
  • 1379 kPa (200 psig)
  • 1724 kPa (250 psig)
  • 4826 kPa (700 psig)
  • 19995 kPa (2900 psig)
Maximum Flow Rate
  • 3-120 slpm
  • 500-20
  • 000 slpm
GateKeeper® Corrosive (C-HCl) provides superior gas purity
Contaminants
  • H2O
  • N2
  • HCl
Gases
  • HCl
  • Cl2
  • DCT
  • TCS
Max Operating Pressure
  • 1828 kPa (250 psig)
  • 3135 kPa (440 psig)
  • 3583 kPa (505 psig)
  • 20096 kPa (2900 psig)
Maximum Flow Rate
  • 1 -10 slpm
  • 20-120 slpm
  • 300-500 slpm
  • 1000-2500 slpm
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