Wafergard® III NF Micro In-line Gas Filters
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- Ultrapure gas lines
- High-temperature applications
- New fab construction
- Dynamic-pressure applications
- Inert and reactive gases
Specifications
Materials | Filter element | Patented, sintered nickel membrane filter |
Housing | Electropolished VAR 316L stainless steel housing | |
Downstream cleanliness | Particles* | Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm |
Volatile** | Volatile outgassing of H2O, O2, and THC is below detectable limits (by RGA and FID at room temperature) | |
Removal rating | ≥0.0015 μm | |
Surface finish interior | ≤5 μin Ra | |
Helium leak rating | Qualified | 2x10-10 atm cc/sec. |
Tested | 1x10-9 atm cc/sec. | |
Operating conditions | Maximum allowable working pressure (design pressure): 207 bar (3000 psi) @ 100°C (212°F) | |
Maximum forward/reverse differential pressure: 35 bar (500 psid) | ||
Maximum operating temperature: Inert gases 400°C (752°F) @ 35 bar (500 psi); Corrosive and reactive gases: 50°C (122°F) @ 70 bar (1000 psi) | ||
Warranty | 5 year | |
Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size) | |
Flow rating | Refer to performance data |
*Particle cleanliness qualified following SEMASPEC Test Method for Particle Shredding (#93021511A-STD)
**Volatile cleanliness qualified following SEMASPEC Test Method for THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), and Oxygen Contribution (#90120398B-STD).
Successfully Opted for software Updates
Part Number | Fitting Size and Type | Length |
---|---|---|
WG3NS5RR2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 84.1 mm (3.31") |
WG3NSMFF2 | 1/4" Gasket seal (compatible with VCR fitting) female inlet/outlet | 58.4 mm (2.30") |
WG3NSMFR2 | 1/4" Polarized gasket seal (compatible with VCR fitting) female inlet/male outlet | 71.1 mm (2.80") |
WG3NSMJJ2 | 1/4" Butt weld inlet/outlet | 28.4 mm (1.12") |
WG3NSMSL2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 50.8 mm (2.00") |