Wafergard® II SF Mini/Mini XL In-line Gas Filters
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Ultrapure gas lines
- High-temperature applications
- Dynamic-pressure applications
- Inert and reactive gases*
- Gas cabinets
- Gas panels
- Valve manifold boxes
- Hookup
*Not compatible for O3
Specifications
Materials | Filter element | 316L stainless steel |
Housing, end cap | Low sulfur 316L stainless steel | |
Initial downstream cleanliness | ≤0.03 particles/liter (≤1 particle/ft3) ≥ 0.01 μm | |
Removal rating | ≥0.0015 μm | |
Particle retention | Greater than 99.9999% (6 LRV) removal of all particles at 30 slm (Mini) and 60 slm (Mini XL); referenced at the most penetrating particle size | |
Surface finish interior | ≤5 μin Ra | |
Helium leak rating | Qualified | 2 x 10-11 Pa m3/sec (2 x 10-10 atm cc/sec) |
Tested | 9 × 10-10 Pa m3/sec (9 x 10-9 atm cc/sec) | |
Maximum conditions | Maximum operating pressure: | 16.2 MPa (162 bar, 2346 psig) @ 20°C (68°F) |
Maximum forward/reverse differential pressure: | 3 MPa (30 bar, 435 psid) @ RT | |
Maximum operating temperature: | Inert gases: 400°C (752°F) | |
Flow rating | See performance data |
Successfully Opted for software Updates