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  • Industry
  • Process
  • Fitting Size
  • Fitting Type
  • Length
  • Max Operating Pressure
  • Max Temperature
  • Maximum Flow Rate
Find Linegard™ GIGAX-FP Filters at Entegris. Industry-leading GIGAX-FP Filters since 1966. Entegris. Creating a material advantage.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
Fitting Size
  • 1/2"
  • 3/4"
Fitting Type
  • Gasket seal
  • Compression seal
  • Butt weld
Superior particulate filtration for ultrapure gas system filtration. Recommended for inert and reactive gases, the Wafergard® II F Micro In-Line Gas Filters offer excellent compatibility with all classes of semiconductor process gases.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
Fitting Size
  • 1/4"
Fitting Type
  • Gasket seal
  • Butt weld tube
Superior particulate filtration for ultrapure gas systems. Wafergard® II F Mini XL Gas Filters deliver excellent compatibility with all classes of semiconductor process gases.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Deposition
  • Dry Etch
  • Ion Implantation
Fitting Size
  • 1/4"
  • 1/2"
  • 3/8"
Fitting Type
  • Gasket seal
  • Butt weld tube
  • Compression seal
Wafergard® GT Plus In-line Gas Filters remove particle from inert gases for flow rates up to 30 SLPM.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Deposition
  • Dry Etch
  • Ion Implantation
Fitting Size
  • 1/4"
  • 1/8"
Fitting Type
  • Compression seal
Wafergard® SG FG Gas filters provide superior particulate filtration to maximize photovoltaic cell and display manufacturing production yields. The all-Teflon® filter elements are compatible with high-purity process gases as well as inert gas and CDA applications.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • C-Silicon
  • Thin Film
  • Deposition
  • Dry Etch
  • Ion Implantation
  • Photolithography
Fitting Size
  • 1/4"
  • 3/8"
Fitting Type
  • Compression seal
  • Gasket seal
  • NPT
Superior particulate filtration for ultrapure gas system filtration. Wafergard® II F-40 Gas Filters deliver excellent compatibility with all classes of semiconductor process gases.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Deposition
  • Dry Etch
  • Ion Implantation
Fitting Size
  • 1/2"
  • 3/4"
  • 3/8"
Fitting Type
  • Gasket seal
  • Butt weld tube
Linegard™ MAX-FP in-line Teflon® gas filters with a particle removal rating of .0.003 µm are designed as a cost-effective solution for mid-flow range on noncritical applications
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
Fitting Size
  • 1/4"
  • 3/8"
  • 1/2"
Fitting Type
  • Swagelok®
  • Male VCR®
  • Female NPT
Superior particulate filtration for ultrapure gas applications. Wafergard® MAX In-line Teflon® Gas Filters deliver the industry’s best filters for ultrapure gas applications.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
Fitting Size
  • 1/4"
  • 3/8"
  • 1/2"
Fitting Type
  • Male VCR®
  • Swagelok®
  • Butt weld tube
Wafergard® Max 1000 In-line Teflon® Gas Filters offer superior particulate filtration for ultrapure gas application. They boast PTFE membranes and 316L stainless steel housings.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
Fitting Size
  • 1/2"
Fitting Type
  • Gasket seal (VCR® compatible)
  • male inlet/outlet
  • Compression seal (Swagelok® compatible)
  • male inlet/outlet
Wafergard® GTL In-Line Gas Filters are designed to remove particles from inert gases for flow rates up to 80 SLPM.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Deposition
  • Dry Etch
  • Ion Implantation
Fitting Size
  • RC 1/4"
  • 1/4"
Fitting Type
  • PT female
  • NPT female
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