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  • Contaminants
  • Gases
  • Industry
  • Process
Aeronex® HX Series Gas Purifiers remove H2O, O2,, CO, CO2 and non-methane hydrocarbons.
Contaminants
  • H20
  • CO
  • CO2
  • O2
  • Toluene
Gases
  • N2
  • H2
  • Ar
Max Operating Pressure
  • 5.51-10.34 bar (80-150 psig)
Maximum Flow Rate
  • 2000 slpm
  • 5000 slpm
The Aeronex Gas Purification system (AGPS) Z2 series, is the latest continuous sevice bulk gas purification system from Entegris.
Contaminants
  • Volatile bases
  • Volatile acids
  • Refractory compounds
  • Condensable organics
  • Moisture
Gases
  • CDA
Max Operating Pressure
  • 5.51-10.34 bar (80-150 psig)
Maximum Flow Rate
  • 5000 slpm
  • 2000 slpm
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