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  • Contaminants
  • Gases
  • Max Operating Pressure
  • Maximum Flow Rate
  • Industry
  • Process
The Aeronex® Gas Purification System, DX series, is the latest continuous service high-flow gas purification system from Entegris. The system brings advanced technology to high-flow gas purification providing semiconductor manufacturers with an innovative, efficient and cost-effective solution to purify purge gases used in dry and immersion-based lithograph tools.
Contaminants
  • Volatile acids
  • Volatile bases
  • Refractory compounds
  • Condensable organics
  • Non-condensable organics
  • Moisture
Gases
  • CO2
Max Operating Pressure
  • 5.1-18 bar (60-250 psig)
  • 5.5-10.3 bar (80-150 psig)
Maximum Flow Rate
  • 300 slpm
  • 5000 slpm
Aeronex® HX Series Gas Purifiers remove H2O, O2,, CO, CO2 and non-methane hydrocarbons.
Contaminants
  • H20
  • CO
  • CO2
  • O2
  • Toluene
Gases
  • N2
  • H2
  • Ar
Max Operating Pressure
  • 5.51-10.34 bar (80-150 psig)
Maximum Flow Rate
  • 2000 slpm
  • 5000 slpm
The Aeronex® SK series removes gaseous contaminants such as H2O, CO2 and O2 to sub- ppb (parts-per-billion) levels in ammonia. The systems utilize ambient temperature purification technology, have a low pressure drop and offer a low cost of ownership.
Contaminants
  • H2O
  • CO2
  • O2
Gases
  • NH3
Max Operating Pressure
  • 515-1825 kPa (60-250 psig)
  • 515-1136 kPa (60-150 psig)
Maximum Flow Rate
  • 120 slpm
  • 300 slpm
  • 700 slpm
The Aeronex Gas Purification system (AGPS) Z2 series, is the latest continuous sevice bulk gas purification system from Entegris.
Contaminants
  • Volatile bases
  • Volatile acids
  • Refractory compounds
  • Condensable organics
  • Moisture
Gases
  • CDA
Max Operating Pressure
  • 5.51-10.34 bar (80-150 psig)
Maximum Flow Rate
  • 5000 slpm
  • 2000 slpm
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