Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Automatic regeneration gas purification systems for removing contaminants down to the part-per-trillion level
GateKeeper® Gas Purification Systems effectively remove gaseous contaminants down to part-per-trillion levels with inorganic media. You can trust our cost-effective GateKeeper® systems to help you avoid contamination of your process without damaging tools.
The GateKeeper Gas Purification System (GPS) DX series is a state-of the-art continuous service gas purification system from Entegris that brings advanced technology to gas purification. It provides semiconductor manufacturers with an innovative solution for higher wafer yields and lower cost of ownership.