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  • Contaminants
  • Gases
  • Industry
  • Process
Find GateKeeper® Luminousgard™ Gas Purifiers at Entegris. Industry-leading gas purifier and gas purification systems since 1966. Entegris. Creating a material advantage.
Contaminants
  • Hydrocarbons
  • SO2
  • SO3
  • NO2
  • HCI
  • HF
  • Ch3COOH
  • H2S
  • NH3
  • CH3NH2
  • (CH3)
Gases
  • CDA
  • N2
  • Ar
  • He
Max Operating Pressure
  • 0.9 Mpa (9 bar / 130.5 psig)
Industry
  • Semiconductor
Find Chacollet™ In-line Hydrocarbon Purifiers at Entegris. Industry-leading gas purifier and gas purification systems since 1966. Entegris. Creating a material advantage.
Contaminants
  • Hydrocarbon
Maximum Flow Rate
  • 30 slpm
Industry
  • Semiconductor
Process
  • Photolithography
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