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Narrow Your Selection
  • Industry
  • Process
  • Contaminants
  • Gases
  • Media
  • Max Operating Pressure
  • Maximum Flow Rate
GateKeeper® Corrosive (C-HCl) provides superior gas purity
Industry
  • Semiconductor
  • LED
Process
  • Epitaxy
  • Dry Etch
  • Wafer Growing
Contaminants
  • H2O
  • N2
  • HCl
Gases
  • HCl
  • Cl2
  • DCT
  • TCS
GateKeeper® GPU Gas Purifiers were designed to improve purity consistency, lifetime and final purity.
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
Process
  • Bulk Gas Delivery
  • Photolithography
  • Epitaxy
  • Dry Etch
  • Wafer Growing
  • Deposition
Contaminants
  • H2O
  • CO2
  • O2
  • CO
  • H2
  • CxHy (45-100 amu)
  • CxHy (>100 amu)
  • Refractory compounds
  • Condensable organics
  • Non-condensable organics
  • Volatile acids
  • Volatile bases
Media
  • EX
  • HX
  • IX
  • TX
  • WX
  • OP
GateKeeper® HX Series for continuous flow, point-of-use purified hydrogen, nitrogen or argon gas at low cost.
Industry
  • Semiconductor
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Epitaxy
Contaminants
  • H2O
  • O2
  • CO
  • CO2
  • H2 (H2 is removed from N2 and noble gases only)
Max Operating Pressure
  • 3135 kPa (440 psig)
  • 3583 kPa (505 psig)
  • 4928 (700 psig)
  • 6996 kPa (1000 psig)
  • 20096 kPa (2900 psig)
GateKeeper® Hydrogen Gas Purifier provide cost-effective, environmentally friendly gas purification
Industry
  • Semiconductor
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Epitaxy
Contaminants
  • O2
  • CO
  • CO2
  • H2O
  • Oxidation byproducts
Media
  • Nickel metallic / Metal Oxide
GateKeeper® Carbon Monoxide Gas Purifiers provide cost-effective gas purification.
Industry
  • Semiconductor
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Epitaxy
Contaminants
  • H2O
  • Metal carbonyls
Media
  • Inorganic
Available for low- and high-flow point-of-use applications, GateKeeper® inert gas purifiers are designed for use with N2, He, Ne, Kr, Xe, Ar, halocar-bons and light hydrocarbons. The purifiers remove O2, H2, CO, CO2 and H2O to sub-ppb (parts-per-billion) levels; SO2 to sub-ppt (parts-per-trillion) levels.
Industry
  • Semiconductor
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Epitaxy
Contaminants
  • O2
  • H2
  • CO
  • CO2
  • H2O
  • SO2
Media
  • Nickel metallic / Metal oxide
Cost Effective, low environmentally friendly gas purifier
Industry
  • Semiconductor
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Epitaxy
Contaminants
  • CO2
  • CO2, H2O (only H2O is removed from SF6 and CO2)
Media
  • Specialty inorganic oxides
Entegris’ GateKeeper® 200M Bulk Gas Purifiers are ideal for facility purification and as backup to the AGPS auto-regen system or other bulk purification systems.
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
Process
  • Bulk Gas Delivery
  • Photolithography
Contaminants
  • H2O
  • CO2
  • CO
  • O2
  • H2
  • H2S
  • NOx
  • NH3
  • NMHC
  • SO2
Media
  • Nickel metallic
  • Inorganic
Available for low and high-flow applications, GateKeeper® optics gas purifiers are designed for use with CDA (air) and remove H2O, volatile bases, volatile acids, condensable organics and refractory compounds to ppt (parts-per- trillion) levels.
Industry
  • Semiconductor
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Epitaxy
Contaminants
  • H2O
  • Volatile bases
  • Volatile acids
  • Condensable organics
  • Refractory compounds
Media
  • Inorganic
GateKeeper® Hydride Gas Purifiers provide Cost-effective, environmentally friendly gas purification.
Industry
  • Semiconductor
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Epitaxy
Contaminants
  • O2
  • CO2
  • H2O (<12 ppb in NH3)
Media
  • Inorganic
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