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  • Dome Material
  • Mask Size
  • Industry
  • Process
Reticle SMIF Pods designed to protect, store and transport valuable lithography reticles.
Dome Material
  • Clear ABS
  • Clear polycarbonate
Mask Size
  • 152 mm sq. (6" sq.)
Industry
  • Semiconductor
Process
  • Photolithography
Entegris’ RSP-200 reticle SMIF pod provides high-reliability handling of 150 mm or 200 mm masks and reticles with or without pellicles.
Dome Material
  • Amber ABS
  • PEEK dome with IDP polycarbonate window
  • PEEK dome with amber ABS window
Mask Size
  • 127 mm sq. (5" sq.) and 152 mm sq. (6" sq.)
Industry
  • Semiconductor
Process
  • Photolithography
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