Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
PlanarClean® AG Cleaning Solutions are designed for advanced Cu post-CMP process. The proprietary formulations offer increased performance through enhanced reliability and yield, low to zero corrosion and defects and increased queue time.
Extremely low defectivity
Extremely low etch rate of all major substrates
Extended corrosion prevention Low Cu roughness and organic residues Superior performance even at higher point-of-use dilution
Meets EHS requirements for fab chemistry
Read MoreRead Less
Interested in PlanarClean® AG Cleaning Solution?
Contact your Entegris account manager or
Top of page
ApplicationsPlanarClean® AG Cleaning Solution Applications