PlanarClean® AG W100 formulated solutions provide one-step, superior cleaning in advanced processes while protecting the underlying thin films and materials. The proprietary formulations offer increased performance through enhanced reliability and yield, low to zero corrosion and defect and increased queue time.
Excellent removal of particles and metal contamination in one-step clean
Low-to-zero corrosion and defects on W surface
Compatible with major consumables
Meets EHS requirements for fab chemistry
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ApplicationsPlanarClean® AG W100 Cleaning Solution Applications