Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
UltraPur™ TEB is an organic boron ester compound widely used as a boron source in the deposition of doped silicate glass in a low pressure and plasma-enhanced CVD process. The difference between UltraPur™ TEB and UltraPur™ TEB11 is the isotopic enrichment in TEB11. TEB11 can be introduced into existing processes without the requirement to change other process parameters.
Lower probability of damage or soft errors due to alpha particles created in the films
Improved performance characteristics over diborane
Replaces diborane and trimethylborate
Ease of handling a liquid
Reduced health hazards
Improved purity Ievels
Standard shelf life of 24 months
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Interested in TEB11?
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