HfCl4
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Primary application:
- ALD
Specifications
Element | Specification* |
Aluminum | 500 |
Antimony | 2 |
Arsenic | 3 |
Barium | 3 |
Cadmium | 2 |
Calcium | 3 |
Chromium | 4 |
Colbalt | 2 |
Copper | 4 |
Gallium | 3 |
Germanium | 2 |
Iron | 25 |
Lead | 4 |
Lithium | 2 |
Magnesium | 2 |
Manganese | 3 |
Nickel | 3 |
Potassium | 11 |
Sodium | 12 |
Strontium | 2 |
Tin | 2 |
Titanium | 63 |
Tungsten | 2 |
Uranium | 13 |
Zinc | 150 |
Zirconium | 2000 |
*All units in parts per million (ppm).
Purity based on elements specified = 99.7%.
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